Characteristics of Indium Doped SnO2Thick Film for Gas Sensors
نویسندگان
چکیده
منابع مشابه
Integrated ultra-thin-film gas sensors
The fabrication and performance of an ultra-thin-film integrated gas sensor for detecting impurities in semiconductor process gases are described. Detector responses are based on gas-induced resistance changes in an ultra-thin Ti-P film mounted on a thin dielectric window supported by a silicon rim. The window temperature can be shifted several hundred degrees Celsius in less than one second. G...
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2010
ISSN: 1225-0562
DOI: 10.3740/mrsk.2010.20.8.408